Instrument description.
It opens up the boundary of laser microscope.
-always reliable images and measurements-.
Advantages of laser scanning microscope.
Non-contact, lossless, fast imaging and measurement.
0 non-contact, non-destructive measurement.
The (LSM) of laser scanning microscope uses low power laser and does not touch the sample. Therefore, there is no risk of damage to the sample like the contact surface roughness measuring instrument based on the probe system.
0 can be imaged without prior preparation.
Scanning electron microscope (SEM) requires pre-sample preparation, such as vacuum dehydration and / or slicing, before observation to make it suitable for the sample chamber. On the other hand, LSM can measure the sample without prior sample preparation. Moreover, after the sample is placed on the loading table, the imaging can be started directly.
Excellent XY measurement.
0 accurate measurement of submicron distance in XY plane.
The interferometer is an optical microscope based on ordinary white light, and its plane resolution is not high. On the other hand, LSM greatly improves the plane resolution by using a larger numerical aperture objective lens and a smaller wavelength light wave. And through high-precision laser control technology, a more accurate surface morphology of the sample is obtained. According to the captured images, LSM can make very accurate XY plane submicron measurements. The LEXT OLS4100 achieves a planar resolution of 0.12 μ m.
Excellent Z-axis measurement.
0 accurate measurement of submicron height in Z direction.
SEM can capture ultra-high resolution images, but can not get height information. LSM uses a short-wavelength semiconductor laser and a unique dual confocal optical system, which removes the signal from the unfocused region and detects only the reflected light within the focused range to the same height. At the same time, combined with high-precision raster reading ability, we can generate high-quality images and achieve accurate 3D measurement. LEXT OLS4100 achieves the high resolution of 10nm.
OLS41003D measurement laser microscope application, OLS41003D measurement laser microscope quotation, OLS41003D measurement laser microscope parameters, scanning probe microscope / SPM (atomic force microscope) quotation
AXISNOVAX AXIS SUPRA+ AMICUS OLS41003D OLS4500 SPM-8000FM SPM-9700 EPMA-1720Series EPMA-8050G